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Entrepix

SpeedFam IPEC 372 - CMP Polisher, SpeedFam Auriga -, Speedfam Auriga EC - CMP Wafer Polisher, AMAT Mirra 3400 - CMP Wafer Polisher, AMAT Mirra Reflexion CMP System fournissder

Therma-Probe TP420

  • Category:General Industrial Equipment/Boilers
  • Spec:Wafer Sizes: 2 inch, 3 inch, 100 mm, 125...
  • Packing:
  • Usage:
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420 HIGH STABILITY AUTOMATED ION IMPLANT PROCESS CONTROL SYSTEM The Therma-Probe model TP420 uses a laser-based, noncontact, nondestructive measurement technique for monitoring ion implantation and other processes. The standard configuration includes: automatic thermal wave measurement system for implants with doses from 1x1011 to 2x1016 ions/cm2 and energies from 5 keV to 3 MeV.

 

The thickness of any oxide over the implanted area is automatically measured at the same time as the dose measurement. The measurement system uses two lasers HeNe 670 nm and a high power 10 mw Argon Laser 740 nm to: (1) induce modulated thermal and plasma waves into the substrate; and (2) monitor the resulting modulated reflectance signal. The measurement system also includes a precision x-y-theta stage with centering and flat/notch finding capabilities and a high speed autofocus system for the 0.9 micron measurement spot.

 

A temperature control system is used to maintain high measurement repeatability. Fully integrated wafer handling system with automated random access robotic wafer handler and two cassette stations (one for the measurement of Silicon Calibration Wafers). The system is capable of handling SEMI standard 100 to 200 mm wafers.

Production Capacity:
per
Delivery Time:
48 hours
Min.Order Quantity:
 
Port:
 
Payment Terms:
L/C,D/A
Main Markets:
Eastern Europe,Northern Europe,Southern Europe
Company Name:
Entrepix
Contact Person:
Mr 
Telephone:
1-602-426-8677
Fax:
1-602-426-8678
Email:
info@entrepix.com
Website:
www.entrepix.com
Country/Territory:
Armenia
Address:
4717 E Hilton Avenue Suite 200 Phoenix, AZ 85034 USA

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