Apollo Stripper
The cost of new stripping systems has escalated to unreasonable levels. Trion has solved this critical problem. The Apollo is an inexpensive and versatile system, which can handle 100-300mm wafers. By employing either ICP or microwave and RF bias power as needed, difficult to remove layers of resist can be removed at low temperatures. As required by application, this system can incorporate the SST-Lightning microwave source (which is both reliable and free from typical microwave tuning problems) or ICP technology.
• Etch rates up to 6um/min • 100mm to 300mm wafers
• High throughput • Small footprint
• Low plasma damage • Competitively priced
• Self-tuning
Applications
MEMS, Compound Semiconductor, Pilot Line Production
Trion Technology, Inc. is the largest domestic US supplier of custom Plasma Etch and Deposition Equipment for over 20 years. We also have a significant presence in Asia with equipment in Japan, Taiwan, Philippines, China, Malaysia and Singapore.
Trion manufactures a wide variety of systems for the Compound Semiconductor, MEMS, Opto-Electronic and other markets. Our products feature the smallest footprint and lowest cost systems in the industry with proven production reliability. If you wish anything from full-blown production cluster tools to a simple laboratory system, Trion makes it.
Mission Statement
To provide the semiconductor industry with state-of-the-art processing equipment at a reasonable cost.
Benefits
• Innovative, state-of-the-art design
• Simple modular designs
• Reasonably priced
• Advanced process support laboratories
• Reliable equipment backed by a fast, responsive service team
Apollo Stripper
The cost of new stripping systems has escalated to unreasonable levels. Trion has solved this critical problem. The Apollo is an inexpensive and versatile system, which can handle 100-300mm wafers. By employing either ICP or microwave and RF bias power as needed, difficult to remove layers of resist can be removed at low temperatures. As required by application, this system can incorporate the SST-Lightning microwave source (which is both reliable and free from typical microwave tuning problems) or ICP technology.
• Etch rates up to 6um/min • 100mm to 300mm wafers
• High throughput • Small footprint
• Low plasma damage • Competitively priced
• Self-tuning
Applications
MEMS, Compound Semiconductor, Pilot Line Production