420 HIGH STABILITY AUTOMATED ION IMPLANT PROCESS CONTROL SYSTEM The Therma-Probe model TP420 uses a laser-based, noncontact, nondestructive measurement technique for monitoring ion implantation and
Tango Systems' Axcela™ is a PVD system for a variety of applications. The system is ideally suited for barrier and seed layers for through-silicon vias (TSVs), under
Entrepix is an industry-leading supplier of used OnTrak DSS200 tools, including OEM-Authorized refurbished Integra OnTrak double sided scrubber platforms. The Integra uses proven Synergy cleaning t
Entrepix is an industry-leading supplier of used OnTrak DSS200 tools, including OEM-Authorized refurbished Series 1 OnTrak double sided scrubber platforms. The system is composed of multiple compon
The Applied Mirra Mesa CMP system is an automated dry-in dry-out system that uses a combination of chemistry and abrasion under controlled conditions to remove specific amounts of materia
The Applied Reflexion CMP system is an automated system that uses a combination of chemistry and abrasion under controlled conditions to remove specific amounts of material from wafer sur
The Applied Mirra CMP system is an automated system that uses a combination of chemistry and abrasion under controlled conditions to remove specific amounts of material from wafers surfaces. The Mirra
The SpeedFam Auriga EC wafer polisher is a fully automated, precision tool for chemical mechanical planarization (CMP) polishing of semiconductor (and related industries) 150 mm and 200 mm wafers. The
The SpeedFam Auriga wafer polisher is a fully automated, precision tool forchemical mechanical planarization (CMP) polishing of semiconductor (and related industries) 150 mm and 200
The IPEC Avanti 372 wafer polisher is a fully automated, precision tool for chemical mechanical planarization (CMP) polishing of semiconductor wafers. It can planarize wafers from 100 mm to 200 mm